Hybrid Scanning Probe with Integrated X-ray Focusing Element

Conventional nanoscale imaging and X-ray microscopy technologies provide powerful capabilities for high-resolution surface characterization and material analysis, but remain limited in their ability to precisely localize and manipulate X-rays at the nanoscale. Atomic Force Microscopy (AFM) enables precise three-dimensional positioning and surface characterization through a movable scanning probe. However, existing AFM systems generally lack an integrated mechanism for delivering or collecting X-rays directly at the probe location. Accordingly, there is a need for an approach that combines the precise positioning and self-sensing capabilities of an AFM probe with X-ray focusing capabilities to enable mobile, localized, and accurately controlled nanoscale X-ray interaction.

 

Researchers at Arizona State University have developed a novel scanning probe microscope integrating an x-ray focusing device for high-resolution, localized X-ray focusing and spectroscopy. By merging X-ray optics directly with the scanning probe, it provides precise X-ray manipulation, allowing simultaneous acquisition of topographical and X-ray data for advanced failure analysis and nanolithography applications. Further, this enables co-registered acquisition of topography and localized X-ray data with nanometer accuracy, surpassing traditional stationary X-ray microscopy systems by providing real-time positional control and combined analytical capability at the nanoscale.

 

This novel hybrid system allows X-ray delivery or detection at any chosen location on a sample surface, enhancing control and flexibility in nanoscale analysis.